METHOD OF SHAPING LITHOGRAPHICALLY-PRODUCED PROBE ELEMENTS

METHOD OF SHAPING LITHOGRAPHICALLY-PRODUCED PROBE ELEMENTS

A method is provided for shaping tips of lithographically-produced probe elements configured for use in a probe card to establish electrical communication with a contact of a semiconductor device to be tested. The method includes (a) lithographically producing a plurality of probe elements and (b) u...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TUNABOYLU, BAHADIR, MALANTONIO, EDWARD, L
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A method is provided for shaping tips of lithographically-produced probe elements configured for use in a probe card to establish electrical communication with a contact of a semiconductor device to be tested. The method includes (a) lithographically producing a plurality of probe elements and (b) using a subtractive process, such as laser ablation or micro-electro-discharge machining, to remove material from each tip of the plurality of probe elements to form each tip into a shape well adapted to penetrate a contaminant oxide layer.