Gas laser oscillator
A gas laser oscillator (11) includes a supply-side valve (35,37) for regulating a laser gas supply to a gas chamber (13), a exhaust-side valve (43,45,47) for regulating a laser gas exhaust from the gas chamber (13), a gas pressure measuring device (29) for measuring a pressure in the gas chamber (13...
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| Hauptverfasser: | , , , |
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | A gas laser oscillator (11) includes a supply-side valve (35,37) for regulating a laser gas supply to a gas chamber (13), a exhaust-side valve (43,45,47) for regulating a laser gas exhaust from the gas chamber (13), a gas pressure measuring device (29) for measuring a pressure in the gas chamber (13), and a control device (15) functioning as a laser gas replacement measuring device. The control device (15) makes a first measurement and a second measurement of the pressure in the gas chamber (13) by a gas pressure measuring device (29) at a predetermined time interval during the vacuuming or purging of the gas chamber (13), and determines the laser gas replacement amount per unit time during the laser oscillating operation, based on the results of the first and second measurements. |
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