Curved slit valve door with flexible couplings

Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage (316) in a chamber includes an elongated door member (402) having a concave sealing face coupled to an actuator by a flexible coupl...

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Bibliographische Detailangaben
Hauptverfasser:	BERKSTRESSER, DAVID, LEE, JAEULL
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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Beschreibung
Zusammenfassung:	Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage (316) in a chamber includes an elongated door member (402) having a concave sealing face coupled to an actuator by a flexible coupling (419). The flexible coupling (419) configured to allow movement of the door member (402) relative to the lever arm (413) in at least two planes.