ROTATION SPEED SENSOR

Disclosed is a rotational rate sensor with a substrate, at least one basic element ( 1 ) which comprises a frame ( 2 ), a suspension ( 7 ) of the frame ( 2 ) on the substrate, at least one vibration facility ( 3 ) and a suspension ( 4, 5 ) of the vibration facility ( 3 ) on the frame ( 2 ), a drive...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GOTTINGER, REINHARD, GUENTHNER, STEFAN, KAPSER, KONRAD, HARTMANN, BERNHARD
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:Disclosed is a rotational rate sensor with a substrate, at least one basic element ( 1 ) which comprises a frame ( 2 ), a suspension ( 7 ) of the frame ( 2 ) on the substrate, at least one vibration facility ( 3 ) and a suspension ( 4, 5 ) of the vibration facility ( 3 ) on the frame ( 2 ), a drive device ( 8 ) and a reading facility ( 9, 10 ). The drive device ( 8 ) is designed in such a manner that it acts on the frame ( 2 ) of the basic element ( 1 ).