ROTATION SPEED SENSOR
Disclosed is a rotational rate sensor with a substrate, at least one basic element ( 1 ) which comprises a frame ( 2 ), a suspension ( 7 ) of the frame ( 2 ) on the substrate, at least one vibration facility ( 3 ) and a suspension ( 4, 5 ) of the vibration facility ( 3 ) on the frame ( 2 ), a drive...
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Hauptverfasser: | , , , |
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Disclosed is a rotational rate sensor with a substrate, at least one basic element ( 1 ) which comprises a frame ( 2 ), a suspension ( 7 ) of the frame ( 2 ) on the substrate, at least one vibration facility ( 3 ) and a suspension ( 4, 5 ) of the vibration facility ( 3 ) on the frame ( 2 ), a drive device ( 8 ) and a reading facility ( 9, 10 ). The drive device ( 8 ) is designed in such a manner that it acts on the frame ( 2 ) of the basic element ( 1 ). |
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