Method for providing control signals for high frequency power generators

Method for producing control signals (C, D) from high frequency power generators supplying a plasma process with high frequency power comprises using a digital functional generator, preferably a digital sinusoid generator. Independent claims are also included for the following: (1) High frequency generator control device (2) for controlling the high frequency generators; and (2) High frequency plasma excitation device comprising the high frequency generators. Preferred Features: The control signals have different frequencies. The control signals can be adjusted via a digital interface of the high frequency generator control device.