LIGHT SOURCE FOR PHOTOLITHOGRAPHY

A hybrid light source for photolithography is disclosed. According to an embodiment of the invention, a light source comprises, a head, a first set of poles coupled to the head, the first set of poles are located approximately at an outer edge of the head, and a second set of poles coupled to the he...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PADIYAR, SUSHIL, D, LEE, EVERETT, B, YANG, HSUEN
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A hybrid light source for photolithography is disclosed. According to an embodiment of the invention, a light source comprises, a head, a first set of poles coupled to the head, the first set of poles are located approximately at an outer edge of the head, and a second set of poles coupled to the head located between the outer edge and a center of the head. According to a further embodiment of the invention, the poles are adjustable to change the characteristics of the light source.