POSITIVE LIGHT-SENSITIVE RESIN COMPOSITION AND RELIEF PATTERN USING THE SAME

The invention provides a composition that is almost insoluble in alkali developers before exposure to light, but becomes highly soluble in alkali developers when exposed to light and that can form a fine, high-resolution pattern, to serve for production of an accurate lens shape with a high transpar...

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Bibliographische Detailangaben
Hauptverfasser:	SUWA, MITSUHITO, MINAMIHASHI, KATSUYA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Beschreibung
Zusammenfassung:	The invention provides a composition that is almost insoluble in alkali developers before exposure to light, but becomes highly soluble in alkali developers when exposed to light and that can form a fine, high-resolution pattern, to serve for production of an accurate lens shape with a high transparency and a high refractive index that can be used to produce optical devices. The invention uses a positive photosensitive resin composition comprising: (a) 100 parts by weight of a polymer that has an alkali-soluble group, (b) 1-30 parts by weight of a compound that absorbs light with the wavelength used for exposure, but is not bleached by the light, (c) 1-50 parts by weight of a quinone diazide compound, and (d) 5-500 parts by weight of particles of at least one inorganic substance selected from the group of an aluminum compound, silicon compound, tin compound, titanium compound and zirconium compound with a diameter in the range of 1 nm to 30 nm.