IMPROVED METHOD FOR MICRO-ROUGHENING TREATMENT OF COPPER AND MIXED-METAL CIRCUITRY

Process to improve adhesion of dielectric materials to a metal layer, including providing an unpatterned metal layer having a first major surface; micro-roughening the first major surface to form a micro-roughened surface; and etching the metal layer to form a circuit pattern in the metal layer, in...

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Bibliographische Detailangaben
Hauptverfasser: FUERHAUPTER, HARRY, JOHAL, KULDIP, SINGH, BARON, DAVID, THOMAS, BROOKS, PATRICK, PAUL
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Process to improve adhesion of dielectric materials to a metal layer, including providing an unpatterned metal layer having a first major surface; micro-roughening the first major surface to form a micro-roughened surface; and etching the metal layer to form a circuit pattern in the metal layer, in which the micro-roughening is carried out prior to the etching.