PLASMA GENERATING ELECTRODE, PLASMA REACTOR, AND EXHAUST GAS PURIFYING DEVICE

A plasma generating electrode 1 of the present invention includes a plurality of unit electrodes 2 hierarchically layered at predetermined intervals, the unit electrodes 2 including a deficient unit electrode 2b in which a conductive film 4 has an absent portion and a normal unit electrode 2a in whi...

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Bibliographische Detailangaben
Hauptverfasser: MIYAIRI, YUKIO, DOSAKA, KENJI, HATANO, TATSUHIKO, IWAMA, KEIZO, SAKUMA, TAKESHI, FUJIOKA, YASUMASA, MASUDA, MASAAKI, IMANISHI, YUUICHIRO
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A plasma generating electrode 1 of the present invention includes a plurality of unit electrodes 2 hierarchically layered at predetermined intervals, the unit electrodes 2 including a deficient unit electrode 2b in which a conductive film 4 has an absent portion and a normal unit electrode 2a in which the conductive film 4 does not have an absent portion. Spaces V formed between the unit electrodes 2 include a normal space Va formed so that the distance between conductive films 4 corresponds to the distance between the unit electrodes 2 and a deficient space Vb formed so that the distance between the conductive films 4 is greater than the distance between the conductive films 4 in the normal space Va. The plasma generating electrode 1 of the present invention can efficiently treat a plurality of predetermined components contained in a treatment target fluid by utilizing different types of plasma suitable for respective reactions by causing the treatment target fluid to flow only once.