PLASMA GENERATING ELECTRODE, PLASMA GENERATION DEVICE, AND EXHAUST GAS PURIFYING APPARATUS

A plasma generating electrode 1 of the invention includes at least a pair of electrodes 5, at least one electrode 5a of the pair of electrodes 5 including a plate-like ceramic body 2 as a dielectric and a plurality of conductive films 3 disposed in the ceramic body 2 and each having a plurality of t...

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Bibliographische Detailangaben
Hauptverfasser: MIYAIRI, YUKIO, MIKI, MASANOBU, DOSAKA, KENJI, HATANO, TATSUHIKO, SAKUMA, TAKESHI, FUJIOKA, YASUMASA, MASUDA, MASAAKI, IMANISHI, YUUICHIRO
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A plasma generating electrode 1 of the invention includes at least a pair of electrodes 5, at least one electrode 5a of the pair of electrodes 5 including a plate-like ceramic body 2 as a dielectric and a plurality of conductive films 3 disposed in the ceramic body 2 and each having a plurality of through-holes 4 formed through the conductive film 3 in its thickness direction in a predetermined arrangement pattern, the through-holes 4 having a cross-sectional shape including an arc shape along a plane perpendicular to the thickness direction, an arrangement pattern of the through-holes 4a formed in at least one conductive film 3 a being different from an arrangement pattern of the through-holes 4b formed in the other conductive film 3b. The plasma generating electrode 1 is capable of simultaneously generating different states of plasma upon application of voltage between the pair of electrodes 5 due to the different arrangement patterns of the through-holes 4 in the conductive films 3.