Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured

Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured

A device for generating radiation based on a discharge includes a cathode (33k) and an anode (33a). The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles (31) may be used to supply the material. The cathode and/or...

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Bibliographische Detailangaben
Hauptverfasser: KRIVTSUN, VLADIMIR MIHAILOVITCH, KOROB, EVGENII DMITREEVITCH, KOSHELEV, KONSTANTIN NIKOLAEVITCH, IVANOV, VLADIMIR VITALEVITCH, GAYAZOV, ROBERT RAFILEVITCH, ZUKAVISHVILI, GIVI GEORGIEVITCH
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:A device for generating radiation based on a discharge includes a cathode (33k) and an anode (33a). The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles (31) may be used to supply the material. The cathode and/or anode may form a flat surface. The trajectories (33) of the material may be elongated. A laser (37) may be used to cause the discharge more easily. The laser may be directed on the anode or cathode or on a separate material located in between the anode and cathode.