MICROMIRRORS WITH OFF-ANGLE ELECTRODES AND STOPS
A spatial light modulator is disclosed, along with methods for making such a modulator that comprises an array of mirror devices each having at least a first electrode and a second electrode. The first electrode is designated for driving the mirror plate of the micromirror device to an ON state, and...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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