MICROMIRRORS WITH OFF-ANGLE ELECTRODES AND STOPS

A spatial light modulator is disclosed, along with methods for making such a modulator that comprises an array of mirror devices each having at least a first electrode and a second electrode. The first electrode is designated for driving the mirror plate of the micromirror device to an ON state, and...

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Bibliographische Detailangaben
Hauptverfasser:	HEUREUX, PETER, HUIBERS, ANDREW, G, PATEL, SATYADEV, R, SPINDT, CHRISTOPHER
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ADDING MATERIALS TO FUELS OR FIRES TO REDUCE SMOKE ORUNDESIRABLE DEPOSITS OR TO FACILITATE SOOT REMOVAL CHEMISTRY FIRELIGHTERS FUELS FUELS NOT OTHERWISE PROVIDED FOR LIQUEFIED PETROLEUM GAS LUBRICANTS METALLURGY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NATURAL GAS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PEAT PERFORMING OPERATIONS PETROLEUM, GAS OR COKE INDUSTRIES PHYSICS SYNTHETIC NATURAL GAS OBTAINED BY PROCESSES NOT COVERED BYSUBCLASSES C10G, C10K TECHNICAL GASES CONTAINING CARBON MONOXIDE TRANSPORTING
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Beschreibung
Zusammenfassung:	A spatial light modulator is disclosed, along with methods for making such a modulator that comprises an array of mirror devices each having at least a first electrode and a second electrode. The first electrode is designated for driving the mirror plate of the micromirror device to an ON state, and the second electrode is designated for driving the mirror plate to an OFF state. The two electrodes can be disposed on the same side of the mirror plate but on opposite sides of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. Alternatively, the two electrodes can be disposed on the opposite sides of the mirror plate, but on the same side of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. The ON state and OFF state of the mirror plate can be defined by stops. The stops may be formed on substrate(s), hinge structures holding the mirror plates of the micromirror device and/or a desired location within the micromirror device. Alternatively, the electrodes for the ON state and the OFF state can be used as stops, either individually or in combination, or in combination with other component(s), such as substrate(s) of the micromirror device. The OFF state angle and the ON state angle are preferably different.