MICROMECHANICAL MOTION SENSOR

A micromechanical motion sensor has electrostatic field oscillations continuously exciting a spring (2) beam (1) with electrostatic non linearity compensation using the same comb drives (KA1,2; KI1,2) or additional comb drives attached at the same points (P1, 2) driven by a periodic compensation fie...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KRIEG, DIETMAR, GOMEZ, UDO-MARTIN, NEUL, REINHARD
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A micromechanical motion sensor has electrostatic field oscillations continuously exciting a spring (2) beam (1) with electrostatic non linearity compensation using the same comb drives (KA1,2; KI1,2) or additional comb drives attached at the same points (P1, 2) driven by a periodic compensation field from the control unit (3).