MEMS ACTUATORS

The MEMS cantilever actuator is designed to be mounted on a substrate. The actuator comprises an elongated hot arm member having two spaced-apart portions, each provided at one end with a corresponding anchor pad connected to the substrate. The portions are connected together at a common end that is...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	VILLENEUVE, JEAN-CLAUDE, LASSONDE, NORMAND, MÉNARD, STÉPHANE
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES HEATING LIGHTING MACHINES OR ENGINES FOR LIQUIDS MECHANICAL ENGINEERING MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOTOTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISEPROVIDED FOR MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PRODUCING MECHANICAL POWER RELAYS SELECTORS SPRING, WEIGHT, INERTIA OR LIKE MOTORS TRANSPORTING WEAPONS WIND, SPRING WEIGHT AND MISCELLANEOUS MOTORS
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Beschreibung
Zusammenfassung:	The MEMS cantilever actuator is designed to be mounted on a substrate. The actuator comprises an elongated hot arm member having two spaced-apart portions, each provided at one end with a corresponding anchor pad connected to the substrate. The portions are connected together at a common end that is opposite the anchor pads. It further comprises an elongated cold arm member adjacent to and substantially parallel of the hot arm member, the cold arm member having at one end an anchor pad connected to the substrate, and a free end that is opposite the anchor pad thereof. A dielectric tether is attached over the common end of the portions of the hot arm member and the free end of the cold arm member. This MEMS actuator allows improving the performance, reliability and manufacturability of MEMS switches.