SHALLOW TRENCH ISOLATION PROCESS

SHALLOW TRENCH ISOLATION PROCESS

A structure including a transistor and a trench structure, with the trench structure inducing only a portion of the strain in a channel region of the transistor.

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Bibliographische Detailangaben
Hauptverfasser: LOCHTEFELD, Anthony, J, CURRIE, Matthew, T
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A structure including a transistor and a trench structure, with the trench structure inducing only a portion of the strain in a channel region of the transistor.