Process for manufacturing a stator stage of a turbomolecular pump

The method involves machining material from a semifinished plate element so as to form an outer ring (52), an inner ring (54) and an annular disk (56') between the inner and outer rings, cutting the annular disk to form stator blades (56) between the rings and angling the stator blades in relat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ENGLAENDER, HEINRICH, WALTER, GERHARD WILHELM
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The method involves machining material from a semifinished plate element so as to form an outer ring (52), an inner ring (54) and an annular disk (56') between the inner and outer rings, cutting the annular disk to form stator blades (56) between the rings and angling the stator blades in relation to the radial plane of the annular disk. An independent claim is also included for a turbomolecular pump stator stage.