Process for manufacturing a stator stage of a turbomolecular pump
The method involves machining material from a semifinished plate element so as to form an outer ring (52), an inner ring (54) and an annular disk (56') between the inner and outer rings, cutting the annular disk to form stator blades (56) between the rings and angling the stator blades in relat...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng ; fre ; ger |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The method involves machining material from a semifinished plate element so as to form an outer ring (52), an inner ring (54) and an annular disk (56') between the inner and outer rings, cutting the annular disk to form stator blades (56) between the rings and angling the stator blades in relation to the radial plane of the annular disk. An independent claim is also included for a turbomolecular pump stator stage. |
---|