AMORPHOUS CARBON FILM FORMING METHOD

An amorphous carbon film forming apparatus according to the present invention is provided with a film forming furnace; plural workpiece fixtures (23) for supporting plural plate-like workpieces (22) that take a disk shape or a ring shape in a state that the same are piled up vertically in parallel,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	FUNAKI, Yoshiyuki, SAITO, Toshiyuki, ANDO, Junji, FUJIOKA, Mikio, NAKANISHI, Kazuyuki, SAKAI, Naoyuki, MORI, Hiroyuki, TACHIKAWA, Hideo, ITOU, Kyouji
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING BRAKES CHEMICAL SURFACE TREATMENT CHEMISTRY CLUTCHES COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COUPLINGS FOR TRANSMITTING ROTATION DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	An amorphous carbon film forming apparatus according to the present invention is provided with a film forming furnace; plural workpiece fixtures (23) for supporting plural plate-like workpieces (22) that take a disk shape or a ring shape in a state that the same are piled up vertically in parallel, the plural workpiece fixtures (23) being arranged within the film forming furnace at a regular angular interval on a circle and being connected to a negative electrode; nozzles (31, 32) provided for supplying a processing gas and including at least one nozzle (31) arranged at a center of the circle on which the plural workpiece fixtures (23) are arranged and plural nozzles (32) arranged at a regular angular interval on another circle which surrounds the workpieces fixtures (23) radially outside thereof; and a plasma power supply connected to at least the workpiece fixtures (23). The workpiece fixtures (23) are of a type that fixes two adjoining plate-like workpieces (22) in touch at their inner and/or outer portions with a cylindrical fixture (232).