SEMICONDUCTOR STRUCTURES WITH STRUCTURAL HOMOGENEITY

Semiconductor structures are formed with semiconductor layers having reduced compositional variation. Top surfaces of the semiconductor layers are substantially haze-free. The method comprises the formation of a semiconductor layer (16) over a top surface of the substrate (12), the semiconductor lay...

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Bibliographische Detailangaben
Hauptverfasser: YANG, Vicky, K, VINEIS, Christopher, J, CURRIE, Matthew, T, WESTHOFF, Richard, LEITZ, Christopher, W
Format: Patent
Sprache:eng ; fre ; ger
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