Ellipsometric method with correction via image registration

The method involves acquiring successive images each representing at least part of an object under different ellipsometrically relevant conditions, storing in a digital memory unit and processing according to defined rules to produce a resulting image or value. It involves defining a region of inter...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	STURM, KAI, HOENIG, DIRK
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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