SACRIFICIAL COMPOSITIONS, METHODS OF USE THEREOF, AND METHODS OF DECOMPOSITION THEREOF

Polymers, methods of use thereof, and methods for fabricating a structure having air-gaps, are provided. One exemplary polymers, among others, includes, a composition having a sacrificial polymer and a photoacid generator.

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Bibliographische Detailangaben
Hauptverfasser:	WHITE, CELESTA, E, REED, HOLLIC KELLEHER, HENDERSON, CLIFFORD, LEE, JAYACHANDRAN, JOSEPH, PAUL, ALLEN, SUEANN, BIDSTRUP, KOHL, PAUL, A
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	Polymers, methods of use thereof, and methods for fabricating a structure having air-gaps, are provided. One exemplary polymers, among others, includes, a composition having a sacrificial polymer and a photoacid generator.