DEVICE AND METHOD FOR THE EVAPORATIVE DEPOSITION OF A HIGH-TEMPERATURE SUPERCONDUCTOR IN A VACUUM WITH CONTINUOUS MATERIAL INTRODUCTION
Device for evaporating a high temperature superconductor (13) on a substrate in a vacuum comprises a refilling unit (5) for receiving a supply of high temperature superconductor material, an evaporation unit (1) for evaporating the high temperature superconductor material in an evaporating zone with...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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