Lithographic apparatus and device manufacturing method

The invention relates to a lithographic apparatus (1) including an illumination system for providing a projection beam of radiation, a support structure for supporting patterning means, the patterning means serving to impart the projection beam with a pattern in its cross-section, a particle-tight s...

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Bibliographische Detailangaben
Hauptverfasser:	VAN DE VEN, BASTIAAN LAMBERTUS WILHELMUS MARINUS, HAM, ERIK LEONARDUS
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HANDLING THIN OR FILAMENTARY MATERIAL HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PACKING PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to a lithographic apparatus (1) including an illumination system for providing a projection beam of radiation, a support structure for supporting patterning means, the patterning means serving to impart the projection beam with a pattern in its cross-section, a particle-tight storage container (4) defining a storage space for storing patterning structures (8), wherein the storage container (4) is arranged to be coupled with a transfer container (6) such that the transfer container (6) for exchanging patterning structures (8) between the transfer container (6) and the lithographic apparatus (1) through a closeable passage (26) between the transfer container (6) and the storage container (4), a substrate table for holding a substrate, and a projection system for projecting the patterned beam onto a target portion of the substrate. Furthermore, the invention relates to a method of using such an apparatus.