HIGHLY PURE FUMED SILICA-POWDER AND METHOD FOR THE PRODUCTION THEREOF
Silica powders (I) with total impurities (IA) less than 500 ppb and (IB) less than 150 ppb are claimed. Independent claims are also included for the following: (1) Production of highly pure fumed silica powder (I) by carrying out flame hydrolysis of highly pure silicon tetrachloride (SiCl 4) in appa...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Silica powders (I) with total impurities (IA) less than 500 ppb and (IB) less than 150 ppb are claimed. Independent claims are also included for the following: (1) Production of highly pure fumed silica powder (I) by carrying out flame hydrolysis of highly pure silicon tetrachloride (SiCl 4) in apparatus with a metal-free surface; (2) Production of highly pure fused silica powder (IA) by sintering fumed powder (I) in apparatus with a metal-free surface; (3) Nozzle comprising an inner tube in an outer tube, in which the inner tube consists of a material (II) containing silicon (Si) with Si as main constituent; (4) Plasma burner comprising a powder nozzle, intermediate tube and outer tube, all with a surface of (II); (5) Apparatus for (I) production, in which all parts coming into contact with (I) are free from metal. |
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