Thin film magnetic sensor and method of manufacturing the same
A thin film magnetic sensor (20) comprises a pair of thin film yokes (24b,24c) each formed of a soft magnetic material, the thin film yokes being arranged to face each other with a gap (24a) interposed therebetween; a GMR film (26) electrically connected to the pair of the thin film yokes and having...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A thin film magnetic sensor (20) comprises a pair of thin film yokes (24b,24c) each formed of a soft magnetic material, the thin film yokes being arranged to face each other with a gap (24a) interposed therebetween; a GMR film (26) electrically connected to the pair of the thin film yokes and having an electrical resistivity higher than that of the soft magnetic material; and an insulating substrate (22) supporting the thin film yokes and the GMR film and formed of an insulating nonmagnetic material. A gap column of a multilayer structure including a layer formed of an insulating nonmagnetic material and a layer of the GMR film is arranged within the gap, and the thickness of the GMR film is uniform over the gap length. |
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