CMOS PROCESS-COMPATIBLE HIGH DIELECTRIC CONSTANT SURFACE COATING FOR THE DETECTION AND STIMULATION OF BIOLOGICAL TISSUE

Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation a...

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Bibliographische Detailangaben
Hauptverfasser: FROMHERZ, PETER, THEWES, ROLAND, BIRKENMAIER, TAMARA, JENKNER, MARTIN, WERSING, WOLFRAM, GABL, REINHARD, EVERSMANN, BJOERN-OLIVER, SCHREITER, MATTHIAS
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation and/or sensor device and the opposite layer area of which forms a stimulation and/or sensor area for capacitive simulation and/or detection of biological tissues, wherein the dielectric layer comprises TiO2.