USE OF ELECTRONIC SPECKLE INTERFEROMETRY FOR DEFECT DETECTION IN FABRICATED DEVICES

Bibliographische Detailangaben

Hauptverfasser:	PETERSON, MICHAEL, L., JR, DILEO, ANTHONY, J
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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