Electron gun

The gun has a cathode electrode (1) which emits electrons, and an anode electrode (3) accelerates the emission electrons. A bias electrode (2) arranged between the cathode electrode and anode electrode controls trajectories of the emission electrons. A shielding portion (12) arranged below the anode...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	OKUNUKI, MASAHIKO, OHTA, HIROYA
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The gun has a cathode electrode (1) which emits electrons, and an anode electrode (3) accelerates the emission electrons. A bias electrode (2) arranged between the cathode electrode and anode electrode controls trajectories of the emission electrons. A shielding portion (12) arranged below the anode electrode shields some of the emission electrons. A cooling portion (14) cools the shielding portion. Independent claims are also included for the following: (A) an exposure apparatus having an electron gun (B) a device manufacturing method having the electron gun.