IMPROVED METHODS AND FURNACES FOR FUSED SILICA PRODUCTION

IMPROVED METHODS AND FURNACES FOR FUSED SILICA PRODUCTION

Methods and apparatus for producing fused silica members having high internal transmission are disclosed. The apparatus and methods are capable of producing fused silica having internal transmission of at least 99.65%/cm at 193 nm.

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Bibliographische Detailangaben
Hauptverfasser: SEMPOLINSKI, DANIEL, RAYMOND, SPROUL, MERRILL, F, MARLEY, FLOYD, E
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMISTRY
GLASS
MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
METALLURGY
MINERAL OR SLAG WOOL
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Beschreibung
Zusammenfassung:Methods and apparatus for producing fused silica members having high internal transmission are disclosed. The apparatus and methods are capable of producing fused silica having internal transmission of at least 99.65%/cm at 193 nm.