Method, apparatus, data carrier and computer program module for monitoring a production process of multiple physical objects

Method, apparatus, data carrier and computer program module for monitoring a production process of multiple physical objects

Method for monitoring a manufacturing process for a multiplicity of physical objects, especially semiconductor wafers, whereby a statistical analysis is carried out using values of at least one process parameter of the manufacturing process. As a result of the statistical analysis, physical objects...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: MAERITZ, JOERN
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
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Beschreibung
Zusammenfassung:Method for monitoring a manufacturing process for a multiplicity of physical objects, especially semiconductor wafers, whereby a statistical analysis is carried out using values of at least one process parameter of the manufacturing process. As a result of the statistical analysis, physical objects are marked if they do not meet a predefined selection criterion and are they subjected to special treatment and measurement. The invention also relates to a corresponding device, computer program element and computer readable storage medium.