Micropump, in particular for integrated device for biological analyses

A micropump comprises body of semiconductor material, and fluid-tight chambers having preset internal pressure. The fluid-tight chambers are selectively openable and formed in the body. Independent claims are also included for: (a) manufacturing a vacuum micropump comprising forming cavities (32) in...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	SCURATI, MARIO
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BLASTING CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	A micropump comprises body of semiconductor material, and fluid-tight chambers having preset internal pressure. The fluid-tight chambers are selectively openable and formed in the body. Independent claims are also included for: (a) manufacturing a vacuum micropump comprising forming cavities (32) in substrate of a wafer of semiconductor material, and sealing the cavities at a preset pressure; (b) amplification comprising amplifying a target nucleic acid in an integrated microfluidic reactor; and (c) biological analysis comprising analyzing a target biological molecule in integrated microfluidic reactor. The fluid having target nucleic acid is moved through the microfluidic device reactor using the micropump.