PROCESS FOR PREPARATION OF POLYCRYSTALLINE SILICON

A process for preparing polycrystalline silicon comprising the steps of (A) reacting trichlorosilane with hydrogen thereby forming silicon and an effluent mixture comprising tetrachlorosilane and disilane described by formula HnCl6-nSi2 where n is a value of 0 to 6 and (B) co-feeding the effluent mi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KENDIG, JAMES, EDWARD, LANDIS, DAVID, RUSSELL, MCQUISTON, TODD, MICHAEL, ZALAR, MICHAEL, MATTHEW
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!