Cathodic arc shielding

A shielding arrangement is described for a cathodic arc deposition apparatus (10) which includes a contactor (22) formed from an electrically conductive material and having an axially extending shaft (24) and a cathode (14). The shielding arrangement includes a cup (26) formed from an electrically c...

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Bibliographische Detailangaben
1. Verfasser:	MARSZAL, DEAN N
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A shielding arrangement is described for a cathodic arc deposition apparatus (10) which includes a contactor (22) formed from an electrically conductive material and having an axially extending shaft (24) and a cathode (14). The shielding arrangement includes a cup (26) formed from an electrically conductive material surrounding a portion of the contactor shaft (24) and a shield (40) for preventing material from being deposited on the cup (26). The shielding arrangement includes a removable ring shield (40) attached to the cup (26) and a cylindrical shield (50) formed from an electrically nonconductive material surrounding the cup (26) and a portion of the shaft (24).