ROTATION RATE SENSOR

A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpend...

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Bibliographische Detailangaben
Hauptverfasser:	DOERING, Christian, FRANZ, Jochen, THOMAE, Andreas, GOMEZ, Udo-Martin, KUHLMANN, Burkhard, NEUL, Reinhard, WILLIG, Rainer, HAUER, Joerg, BAUER, Wolfram, FUNK, Karsten, GOETZ, Siegbert, BISCHOF, Udo, FEHRENBACH, Michael, LUTZ, Markus, WUCHER, Gerhard
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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Beschreibung
Zusammenfassung:	A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.