Process to form a composition-gradient ceramic layer by electron-beam PVD

Formation of a ceramic coating on a substrate (10) by electron beam-physical vapor deposition (EB-PVD) involves: placing a ceramic target rod (20) having lengthwise non-uniform composition in an EB-PVD chamber (14); introducing the substrate into the chamber (14); and sweeping the upper surface of t...

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Bibliographische Detailangaben
Hauptverfasser:	Saint Ramond, Bertrand, Malie, André, Delage, Cyrille, Chaput, Christophe, Porte, Isabelle
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	AIR INTAKES FOR JET-PROPULSION PLANTS ARTIFICIAL STONE BLASTING CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMBUSTION ENGINES COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE CONTROLLING FUEL SUPPLY IN AIR-BREATHING JET-PROPULSION PLANTS DIFFUSION TREATMENT OF METALLIC MATERIAL ENGINE PLANTS IN GENERAL GAS-TURBINE PLANTS HEATING HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING LIME, MAGNESIA MACHINES OR ENGINES IN GENERAL MECHANICAL ENGINEERING METALLURGY NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAMTURBINES REFRACTORIES SLAG STEAM ENGINES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE WEAPONS
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Beschreibung
Zusammenfassung:	Formation of a ceramic coating on a substrate (10) by electron beam-physical vapor deposition (EB-PVD) involves: placing a ceramic target rod (20) having lengthwise non-uniform composition in an EB-PVD chamber (14); introducing the substrate into the chamber (14); and sweeping the upper surface of the rod with an electron beam to melt the target and form of a vapor cloud (24) in the chamber. Formation of a ceramic coating on a substrate (10) by EB-PVD involves: placing a rod-shaped, composite target (20) formed from ceramic powders and having lengthwise non-uniform composition in an EB-PVD chamber; introducing the substrate (10) into the chamber (14); and sweeping the upper surface of the rod (20) with an electron beam to cause melting of the material and the formation of a vapor cloud (24) in the chamber under reduced pressure. The rod (20) has a number of superposed layers of different compositions. The composition within each layer is uniform across the cross-section of the rod (20). Each layer comprises zirconia and at least one oxide selected from oxides of nickel, cobalt. iron, yttrium, hafnium, cerium, lanthanum, tantalum, niobium, scandium, samarium, gadolinium, dysprosium, ytterbium and aluminum. The ceramic coating formed on the substrate (10) by progressive consumption of the rod (20) reflects the variation in the composition of the rod (20). Independent claims are given for: (a) the rod-shaped target; and (b) fabrication of the rod-shaped target.