METHOD FOR PRODUCING THIN FILM SENSORS, ESPECIALLY HOT FILM ANEMOMETERS AND HUMIDITY SENSORS

A method for producing thin film sensors that includes applying a sensor structure to a front of a glass substrate so as to define a combination, connecting a support on a front of the combination. The method further includes removing a portion of the glass substrate over a large surface from a dire...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	TIMELTHALER, WOLFGANG
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A method for producing thin film sensors that includes applying a sensor structure to a front of a glass substrate so as to define a combination, connecting a support on a front of the combination. The method further includes removing a portion of the glass substrate over a large surface from a direction directed from a back of the combination down to a final thickness (d) of the glass substrate and releasing a connection between the support and the combination.