Multilevel pedestal for furnace

A pedestal (100) for use in a high temperature vertical fumace for the processing of semiconductor wafers provides a closure and heat insulation for the lower end of the furnace and is a wafer boat support. The pedestal (100), comprising quartz-enveloped insulation material (130, 132), supports a wa...

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Bibliographische Detailangaben
Hauptverfasser:	HUUSSEN, FRANK, LANDSMEER, TIMOTHY ROBERT, OOSTERLAKEN, THEODORUS GERARDUS MARIA, TERHORST, HERBERT
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FURNACES HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL KILNS LIGHTING MECHANICAL ENGINEERING METALLURGY OVENS RETORTS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION WEAPONS
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Beschreibung
Zusammenfassung:	A pedestal (100) for use in a high temperature vertical fumace for the processing of semiconductor wafers provides a closure and heat insulation for the lower end of the furnace and is a wafer boat support. The pedestal (100), comprising quartz-enveloped insulation material (130, 132), supports a wafer boat at a boat support level (113) and is provided with an upper section (102) disposed above the boat support level (113). The upper section (102) comprises enveloped insulating maferial (130). The envelope of the upper section (102) is also formed of quartz and the insulating material (130) in the upper section (102) has a lower thermal conductance than the insulating material (132) in a lower quartz enveloped section (104).