Method of separating a thin semiconductor die from a wafer

A method of separating a thin die (20, 60) from a support body (72) of a semiconductor wafer (70). The thin die (20, 60) being initially attached to the support body (72) by an attachment mechanism (78, 178). The attachment mechanism may be a plurality of tethers (78, 178). The method may include th...

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Hauptverfasser:	FIELD, CHERY, WANG, JOE PIN, LEFEBVRE, DIDIER R, CHEN, SHIUH-HUI STEVEN
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING RECORD CARRIERS PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS SEMICONDUCTOR DEVICES
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creator	FIELD, CHERY WANG, JOE PIN LEFEBVRE, DIDIER R CHEN, SHIUH-HUI STEVEN
description	A method of separating a thin die (20, 60) from a support body (72) of a semiconductor wafer (70). The thin die (20, 60) being initially attached to the support body (72) by an attachment mechanism (78, 178). The attachment mechanism may be a plurality of tethers (78, 178). The method may include the steps of: positioning the thin die (20, 60) above a hole (112); positioning a tip (128) of a handler (120) above the thin die (20, 60); positioning an ejection pin (150) in a spaced apart relationship beneath the thin die (20, 60); moving the tip (128) downward toward the thin die (20, 60) to break the attachment mechanism (78, 178) and clamp the thin die (20, 60) between the tip (128) and the ejection pin (150); and moving the ejection pin (150) upward until the thin die (20, 60) is extracted from the wafer (70).
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The thin die (20, 60) being initially attached to the support body (72) by an attachment mechanism (78, 178). The attachment mechanism may be a plurality of tethers (78, 178). The method may include the steps of: positioning the thin die (20, 60) above a hole (112); positioning a tip (128) of a handler (120) above the thin die (20, 60); positioning an ejection pin (150) in a spaced apart relationship beneath the thin die (20, 60); moving the tip (128) downward toward the thin die (20, 60) to break the attachment mechanism (78, 178) and clamp the thin die (20, 60) between the tip (128) and the ejection pin (150); and moving the ejection pin (150) upward until the thin die (20, 60) is extracted from the wafer (70).</description><edition>7</edition><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; CALCULATING ; COMPUTING ; COUNTING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HANDLING RECORD CARRIERS ; PHYSICS ; PRESENTATION OF DATA ; RECOGNITION OF DATA ; RECORD CARRIERS ; SEMICONDUCTOR DEVICES</subject><creationdate>2003</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20030820&DB=EPODOC&CC=EP&NR=1336986A2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20030820&DB=EPODOC&CC=EP&NR=1336986A2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>FIELD, CHERY</creatorcontrib><creatorcontrib>WANG, JOE PIN</creatorcontrib><creatorcontrib>LEFEBVRE, DIDIER R</creatorcontrib><creatorcontrib>CHEN, SHIUH-HUI STEVEN</creatorcontrib><title>Method of separating a thin semiconductor die from a wafer</title><description>A method of separating a thin die (20, 60) from a support body (72) of a semiconductor wafer (70). 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The thin die (20, 60) being initially attached to the support body (72) by an attachment mechanism (78, 178). The attachment mechanism may be a plurality of tethers (78, 178). The method may include the steps of: positioning the thin die (20, 60) above a hole (112); positioning a tip (128) of a handler (120) above the thin die (20, 60); positioning an ejection pin (150) in a spaced apart relationship beneath the thin die (20, 60); moving the tip (128) downward toward the thin die (20, 60) to break the attachment mechanism (78, 178) and clamp the thin die (20, 60) between the tip (128) and the ejection pin (150); and moving the ejection pin (150) upward until the thin die (20, 60) is extracted from the wafer (70).</abstract><edition>7</edition><oa>free_for_read</oa></addata></record>
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subjects	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING RECORD CARRIERS PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS SEMICONDUCTOR DEVICES
title	Method of separating a thin semiconductor die from a wafer
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