Method of separating a thin semiconductor die from a wafer

Method of separating a thin semiconductor die from a wafer

A method of separating a thin die (20, 60) from a support body (72) of a semiconductor wafer (70). The thin die (20, 60) being initially attached to the support body (72) by an attachment mechanism (78, 178). The attachment mechanism may be a plurality of tethers (78, 178). The method may include th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FIELD, CHERY, WANG, JOE PIN, LEFEBVRE, DIDIER R, CHEN, SHIUH-HUI STEVEN
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING RECORD CARRIERS
PHYSICS
PRESENTATION OF DATA
RECOGNITION OF DATA
RECORD CARRIERS
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method of separating a thin die (20, 60) from a support body (72) of a semiconductor wafer (70). The thin die (20, 60) being initially attached to the support body (72) by an attachment mechanism (78, 178). The attachment mechanism may be a plurality of tethers (78, 178). The method may include the steps of: positioning the thin die (20, 60) above a hole (112); positioning a tip (128) of a handler (120) above the thin die (20, 60); positioning an ejection pin (150) in a spaced apart relationship beneath the thin die (20, 60); moving the tip (128) downward toward the thin die (20, 60) to break the attachment mechanism (78, 178) and clamp the thin die (20, 60) between the tip (128) and the ejection pin (150); and moving the ejection pin (150) upward until the thin die (20, 60) is extracted from the wafer (70).