METHOD FOR CORRECTING PHYSICAL ERRORS IN MEASURING MICROSCOPIC OBJECTS

METHOD FOR CORRECTING PHYSICAL ERRORS IN MEASURING MICROSCOPIC OBJECTS

A method of correcting physically conditioned errors in the measurement of an object detects an image of the object to be measured, measures the imaged object, determines a measurement error caused by structural surroundings of the object, and corrects the measurement result in dependence on the mea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: EISENMANN, HANS, WAAS, THOMAS, BRUECK, HANS-JUERGEN, HARTMANN, HANS
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A method of correcting physically conditioned errors in the measurement of an object detects an image of the object to be measured, measures the imaged object, determines a measurement error caused by structural surroundings of the object, and corrects the measurement result in dependence on the measurement error.