DEVICE FOR VERTICALLY TRANSPORTING PRODUCTS

The invention relates to a device for vertically transporting products, especially semiconductor wafers and discs. The aim of the invention is to configure such a device in such a way that mechanical abrasion cannot be caused and that mechanical impacts are basically prevented. According to the invention, a device contains a load unit and a drive for vertically moving the load unit. The load unit and the drive are configured in such a way that said unit and drive are coupled to one another without touching each other and that friction pairing is not involved by virtue of magnetic components. Magnetised superconducting moulded parts having a frozen magnetic field are provided. Said parts form a magnetic track holding device for the load unit and guarantee a constant air gap between the load unit and the permanent magnet rails by engaging with vertical permanent magnet rails. The moulded parts are cooled down to a temperature by means of a cooling agent, whereby said temperature is required for the superconducting state. The drive is provided with one or more electromagnetic linear drives. The device can be used in a particularly advantageous manner in clean rooms for vertically transporting products between different levels.