POLYESTER FILM AS SUPPORT FOR DRY FILM RESIST

A polyester film for dry film resists, which satisfies requirements for transparency, particularly transmittance of radiation having a wavelength around 365 nm, slipperiness, winding properties, resolution and recyclability. A polyester film for dry film resists which has a thickness of 10 to 25 mu...

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Bibliographische Detailangaben
Hauptverfasser:	MIZUTANI, KEI, KUBO, KOJI
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F,C08G APPARATUS SPECIALLY ADAPTED THEREFOR CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GENERAL PROCESSES OF COMPOUNDING HOLOGRAPHY LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MATERIALS THEREFOR METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTED CIRCUITS THEIR PREPARATION OR CHEMICAL WORKING-UP TRANSPORTING WORKING-UP
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Beschreibung
Zusammenfassung:	A polyester film for dry film resists, which satisfies requirements for transparency, particularly transmittance of radiation having a wavelength around 365 nm, slipperiness, winding properties, resolution and recyclability. A polyester film for dry film resists which has a thickness of 10 to 25 mu m, a haze value of 3 % or less and a residual polycondensation metal catalyst content of less than 150 ppm, and a metal antimony content of 15 mmol% or less based on the total of all the acid components, and a laminated polyester film comprising a lubricating layer on at least one side of the above film.