APPARATUS FOR FIXING A SHEET-SHAPED ELECTRODE OF A PLASMA POLYMERIZING APPARATUS

An apparatus for fixing an eletrode of an electrode of plama polymerization apparatus is provided, which comprises; a nonconductive holder for fixing an electrode by covering an end part of the electrode, a leadline connecting the electrode with a power supply, and a fixing part fixing the holder on...

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Bibliographische Detailangaben
Hauptverfasser: HA, SAMUL, YOUN, DONG-SIK
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:An apparatus for fixing an eletrode of an electrode of plama polymerization apparatus is provided, which comprises; a nonconductive holder for fixing an electrode by covering an end part of the electrode, a leadline connecting the electrode with a power supply, and a fixing part fixing the holder on a chamber wall.