APPARATUS FOR FIXING A SHEET-SHAPED ELECTRODE OF A PLASMA POLYMERIZING APPARATUS
An apparatus for fixing an eletrode of an electrode of plama polymerization apparatus is provided, which comprises; a nonconductive holder for fixing an electrode by covering an end part of the electrode, a leadline connecting the electrode with a power supply, and a fixing part fixing the holder on...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | An apparatus for fixing an eletrode of an electrode of plama polymerization apparatus is provided, which comprises; a nonconductive holder for fixing an electrode by covering an end part of the electrode, a leadline connecting the electrode with a power supply, and a fixing part fixing the holder on a chamber wall. |
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