Catadioptric reduction lens

The device generates a real intermediate image (3) and has a first catadioptric objective part (5) with a concave mirror and a beam deflector between the object and image planes (2,4) and a dioptric second objective part (8) after the deflector. The second part, which starts after the last mirror su...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BEIERL, HELMUT, EPPLE, ALEXANDER
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The device generates a real intermediate image (3) and has a first catadioptric objective part (5) with a concave mirror and a beam deflector between the object and image planes (2,4) and a dioptric second objective part (8) after the deflector. The second part, which starts after the last mirror surface of the first part, has at least one lens (17) between the last mirror surface (9,10) and the intermediate image. AN Independent claim is also included for the following: a method of manufacturing semiconducting components and other finely structured parts.