Method for maintaining flatness, flatness maintaining unit and device, and disc manufacturing method and device
A method is presented for maintaining a plate member in a flat state, including the steps of placing the plate member on a surface of a supporting member, the surface of the supporting member being in a flat state and having at least one hole penetrating through the surface, and sucking air from a b...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A method is presented for maintaining a plate member in a flat state, including the steps of placing the plate member on a surface of a supporting member, the surface of the supporting member being in a flat state and having at least one hole penetrating through the surface, and sucking air from a back side of the surface of the supporting member to generate an airflow flowing from a front side of the surface towards the back side thereof via the hole so as to retain the plate member on the surface of the supporting member. In this manner, the plate member, such as disc substrates adhered together by using an ultraviolet curable composition, can be accurately maintained in a flat state without damaging the surface thereof. |
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