Apparatus comprising a burner for producing silicon dioxide soot

A precision burner suitable for oxidizing halide-free, silicon-containing compounds, such as octamethylcyclotetrasiloxane (OMCTS), is provided. The burner may include a subassembly (13) which can be precisely mounted on a burner mounting block (107) through the use of an alignment stub (158), a rais...

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Bibliographische Detailangaben
Hauptverfasser:	POWERS, DALE R, KIEFER, WILLIAM J, DESORCIE, ROBERT B, CAIN, MICHAEL B
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	AIR SUPPLY BLASTING BURNERS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMBUSTION APPARATUS COMBUSTION PROCESSES CONSUMING WASTE PRODUCTS BY COMBUSTION CREMATION FURNACES DIFFUSION TREATMENT OF METALLIC MATERIAL DRAUGHT-INDUCING GLASS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES MECHANICAL ENGINEERING METALLURGY MINERAL OR SLAG WOOL SUPPLYING NON-COMBUSTIBLE LIQUID OR GAS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION WEAPONS
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