Scanning and high resolution x-ray photoelectron spectroscopy

The invention refers to an instrument (10) for analysis of a specimen surface which comprises an electron gun (16) for producing a focused electron beam, an anode with an anode surface (22) disposed to receive the focused electron beam so as to generate x-rays from an anode spot on the anode surface...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	PALMBERG, PAUL W, LARSON, PAUL E
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES IRRADIATION DEVICES MEASURING NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The invention refers to an instrument (10) for analysis of a specimen surface which comprises an electron gun (16) for producing a focused electron beam, an anode with an anode surface (22) disposed to receive the focused electron beam so as to generate x-rays from an anode spot on the anode surface, rastering means for rastering the focused electron beam over the anode surface, thereby scanning the anode spot over the anode surface, focusing means receptive of at least a portion of the x-rays from the scanning anode spot for focusing an energy band of x-rays of predetermined energy as an x-ray spot on a pixel area scanning correspondingly over the specimen surface (14), such that photoelectrons are emitted from the scanning pixel area with electron energies characteristic of chemical species at the pixel area, wherein the x-rays and thereby the photoelectrons have a natural energy shift across the specimen surface, analyzer means (54) receptive of at least a portion of the photoelectrons from the scanning pixel area for analyzing the electron energies, compensating means associated with the analyzer means for compensating for the shift, and processing means (76) cooperative with the rastering means and the analyzer means for generating specimen information representative of the electron energies and thereby chemical species of the specimen surface. The invention also refers to an instrument for analysis of an insulating specimen surface which comprises detector means (70) receptive of the photoelectrons for generating corresponding photoelectron signals, flood means for flooding the specimen surface with low energy electrons during periodic intervals so as to neutralize loss of photoelectrons from the specimen surface, and processing means receptive of the photoelectron signals and cooperative with the rastering means so as to effect an imaging of the specimen surface, wherein the photoelectron signals are omitted from the imaging during the periodic intervals.