Anti-deciphering contacts
Anti-deciphering contacts and/or interconnection vias schemes for integrated devices, including the formation of a plurality of false contacts and/or false interconnection vias, intercepted as true contacts and true interconnection vias by lines patterned in a metallization layer deposited over an i...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Anti-deciphering contacts and/or interconnection vias schemes for integrated devices, including the formation of a plurality of false contacts and/or false interconnection vias, intercepted as true contacts and true interconnection vias by lines patterned in a metallization layer deposited over an insulating dielectric layer or multilayer through which the true contacts and/or the true interconnection vias are formed. False contacts and false vias extending in the respective dielectric layer or multilayer for a depth insufficient to reach the active areas of a semiconductor substrate in the case of false contacts or structures of electrically conductive material defined in a layer of conductive material below said dielectric layer or multilayer in the case of interconnection vias. |
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