Fault detection method and apparatus

A method of fault detection groups together operational parameters of a semiconductor processing tool that correlate with one another to generate a fault detection index. These related active sensors are utilized in the selection process of the nearest neighbor vectors to form a vector subset, and a...

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Bibliographische Detailangaben
Hauptverfasser:	LYMBEROPOULOS, DIMITRIS P, REISS, TERRY
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	A method of fault detection groups together operational parameters of a semiconductor processing tool that correlate with one another to generate a fault detection index. These related active sensors are utilized in the selection process of the nearest neighbor vectors to form a vector subset, and are also considered in generating the fault detection index. Cluster sensors are used in the selection process to select data from the model that matches the cluster sensor value. A passive/inclusive sensor is not used to generate predicted values from a model. The value of a passive/inclusive sensor type is used in calculation of the fault detection index. Synthetic sensors are not utilized in the selection process of the nearest neighbor vectors making up the vector subset, and are not utilized in generating the fault detection index.