DEVICE FOR TREATING WAFERS

An installation for processing wafers in at least one clean room is described. The installation has a configuration of production units for carrying out individual production steps and measuring units for inspecting the production steps. The production units and the measuring units are connected via...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	GOETZKE, MICHAEL
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	An installation for processing wafers in at least one clean room is described. The installation has a configuration of production units for carrying out individual production steps and measuring units for inspecting the production steps. The production units and the measuring units are connected via a transport system for feeding and removing the wafers. At least one measuring unit together with an unloading station for delivering wafers to the transport system forms a measuring station, in which case wafers processed so as to be free of defects can be delivered from the measuring station separately from the remaining wafers.